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Angle-resolved HAXPES measurement

HAXPES: Hard X-ray Photoelectron Spectroscopy

In HAXPES, it is possible to obtain information from deep positions (up to about 50 nm) from the sample surface. Furthermore, by using a two-dimensional detector for angle-resolved measurements, data obtained at a wide range of photoelectron emission angles can be divided into information corresponding to different angles, that is, varying detection depths. This allows for a comparison of depth-resolved bonding states to greater depths than XPS in a non-destructive manner. It is effective for evaluating materials where state changes extend not only to the surface but also into the bulk.

  • Contract Analysis
  • Decomposition measurements

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